FluorOptic Fiber Optic Temperature Sensors
Description
Luxtron® M-1100
Fiber optic temperature sensing for semiconductor in etch and deposition applications
- Measurement range from -200 to 450°C to support advanced etch processes
- Advanced low-noise electronics and algorithms give precision better than 0.05°
- AccuDisc™ sensors enable sensor to be separate from the probe enabling greater accuracy and repeatability
- Experienced team to support custom probe development for OEMs
- Compact, DIN-rail size to minimize footprint when integrated into tools and equipment
- Immune to electromagnetic interference from EMI, RF, high voltage and microwave sources
